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本文介绍了根据压电元件快速变形所引起的惯性力和摩擦力实现纳米级驱动装置的原理。针对微位移器的静、动态特性，研制了新型微位移器驱动源。试验结果证明，该驱动源大大改善了微位移器的过渡过程和动态特性，满足微步距驱动装置控制和驱动的需要。
This article describes the principle of implementing nano-scale drives based on the inertia and frictional forces caused by the rapid deformation of piezoelectric elements. Aiming at the static and dynamic characteristics of micro-displacer, a new micro-displacer driving source was developed. The experimental results show that the driving source greatly improves the transient process and the dynamic characteristics of the micro-displacement device, and meets the needs of the control and driving of the micro-pitch driving device.