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一、引言 LSI,特别是MOS-LSI以及LSI半导体存贮器及微处理机工业,是七十年代电子工业的核心,已发展成为第二次工业革命的动力。 以MOS-LSI为例,已由71年的第一代PMOS4004四位微处理机(～770门)发展到亚毫微秒指令时间包括上万门电路的第三代16位μP(微处理机,下同)如Z8000、8086及MC68000等,速度由早期PMOS的上100ns单门时延经硅栅NMOS的儿十ns,降低到HMOSⅡ的0.4ns。即LSI的集成度及速度,在七十
I. INTRODUCTION LSI, especially MOS-LSI and LSI semiconductor memory and microprocessor industry, is the core of the electronics industry in the seventies and has become the driving force of the second industrial revolution. To MOS-LSI, for example, has been the first generation of 71-year-old PMOS4004 four-bit microprocessor (~ 770 gates) developed to sub-nanosecond instruction time, including the third generation of 10,000 circuits 16-bit μP (microprocessor , The same below) such as Z8000, 8086 and MC68000, the speed of the early PMOS by a single gate on the 100ns single-gate delay of a few ten ns silicon gate NMOS, reduced to 0.4ns HMOS Ⅱ. That LSI’s integration and speed, at seventy