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利用磁控溅射方法制备多层膜后 ,再经热处理得到Co Pt C颗粒膜 .热处理使Co Pt颗粒从非晶相转向fccCoPt3和fctCoPt稳定有序相 ,C则保持非晶态 .Pt成分占Co ,Pt总体积的 70 %时 ,膜的矫顽力Hc 可超过 4 0 0kA m .C插层厚度为 0 2— 0 6nm时 ,Hc 最大 ,且在磁滞回线上出现“肩膀” .分析认为这是由于存在两个磁性不同的Co Pt晶相 ,受C成分比的影响 ,使它们之间的耦合性质和强度不同造成的
After the multi-layer film was prepared by magnetron sputtering, the Co Pt C granular film was obtained by heat treatment, the Co Pt particles were changed from amorphous phase to fccCoPt3 and fctCoPt, and C remained amorphous during the heat treatment. Co, Pt total volume of 70%, the film coercivity Hc can exceed 400kC .C intercalation thickness of 0 2- 06nm, Hc maximum, and in the hysteresis loop “shoulder.” It is considered that this is due to the existence of two magnetically different Co Pt crystal phases which are affected by the ratio of the C component, resulting in different coupling properties and intensities between them