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介绍了微束微区X荧光探针分析仪的工作原理,该探针分析仪能够对样品表面约50Lm范围内进行多元素定性与定量分析。在定量分析中,建立线性校准方程,采国家标准样品对微束微区X荧光该探针分析仪进行校准曲线的系数标定。以Fe、As和Ti元素所制定的校准曲线为例,定量分析出的元素含量与标准含量相对误差低于9.62%。结果显示微束微区X荧光探针分析仪具有较高的能量的分辨率,可以快速鉴定矿石的物质成分。定量分析结果的准确度低于地质样品分析的误差标准。表明该探针分析仪可以应用于野外条件下矿石微区成分的定性与定量分析。
The working principle of the microbeam X-ray fluorescence probe analyzer is introduced. The probe analyzer can carry out multi-element qualitative and quantitative analysis on the sample surface of about 50Lm. In the quantitative analysis, the linear calibration equation is established, and the national standard sample is taken to calibrate the calibration curve of the probe analyzer to the micro-beam micro-area X-ray fluorescence probe. Taking the calibration curve prepared by Fe, As and Ti elements as an example, the relative error between quantitative analysis of elemental content and standard content is less than 9.62%. The results show that the micro-beam X-ray fluorescence probe micro-analyzer has a high resolution of energy, can quickly identify the material composition of ore. The accuracy of the quantitative analysis results is lower than the error standard of geological sample analysis. It shows that the probe analyzer can be applied to the qualitative and quantitative analysis of ore micro-composition in the field.