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采用溶胶-凝胶法在普通化玻片上制备出高C轴择优取向的ZnO薄膜,深入研究了溶胶浓度、甩膜层数、退火温度对薄膜相结构、晶粒定向生长和紫外光吸收与可见光透射特性的影响。实验发现,在300~600℃退火范围之内,随着退火温度的升高,薄膜晶粒生长取向性增强,晶粒尺寸增大;用Zn含量为0.5mol/L的溶胶使用旋涂法甩膜和经过预热处理的5层膜再经过550℃退火1h后所形成的薄膜晶粒沿C轴高度择优取向,结构系数Tc(002)达到5.1,该薄膜的平均透射率为90%。
The ZnO thin films with high preferred orientation on the C-axis were prepared by sol-gel method. The effects of sol concentration, film thickness and annealing temperature on the phase structure, grain growth, UV absorption and visible light Influence of transmission characteristics. The experimental results show that with the annealing temperature increasing from 300 ℃ to 600 ℃, the grain growth orientation increases and the grain size increases. With a sol with a Zn content of 0.5mol / L, the spin coating method is used The films and pre-heat treated 5-layer films were annealed at 550 ℃ for 1h. The formed films were highly preferentially oriented along the C-axis with a structure coefficient Tc (002) of 5.1 and an average transmittance of 90%.