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子孔径拼接技术与补偿检验技术的结合能够增加干涉仪的横向和垂直动态测量范围,适用于大口径、大非球面度的非球面的面形测量。利用一对相向回转的Zernike相位板作为近零位补偿器,产生可变的像差,补偿不同非球面在不同离轴位置的子孔径像差,使其剩余像差减小到干涉仪的垂直动态测量范围内。通过计算两个待测非球面的子孔径像差,求解Zernike相位板的相位函数;同时结合四台阶刻蚀工艺和载频技术,成倍提高衍射效率并隔离干扰衍射级次的影响。以同温层红外线天文台(SOFIA)望远镜的凸双曲面次镜和凹非球面反射镜为例,验证了该近零位补偿器实现不同非球面的子孔径像差补偿的能力,表明其具有良好的面形适应性。
The combination of subaperture splicing technique and compensation inspection technique can increase the lateral and vertical dynamic measuring range of the interferometer and is suitable for the measurement of aspheric surface with large diameter and large asphericity. Using a pair of Zernike phase plates rotating in opposite directions as the near zero compensator, a variable aberration is generated to compensate the subaperture aberration of different aspherical surfaces in different off-axis positions and reduce the residual aberration to the vertical Dynamic measurement range. The phase function of the Zernike phase plate is calculated by calculating the subaperture aberrations of the two aspheric surfaces to be measured. Meanwhile, combining the four-step etching process and the carrier frequency technique, the diffraction efficiency and the influence of interference diffraction orders are doubled. Taking the convex hyperboloid secondary aspheric mirrors and concave aspherical mirrors of the stratospheric infrared observatory (SOFIA) as an example, the performance of the near null compensator in compensating the subaperture aberrations of different aspheric surfaces is verified, indicating that it has a good performance Face shape adaptability.