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通过对光刻机与激光精密工作台中的氮化钢与轴承钢制造的七种精密导轨进行油浴时效,氨气、氢气与低真空保护的消除应力退火试验,得出了真空退火可充分消除机械加工的残余应力,并减少导轨最终热处理的变形的结果。在温度520～560℃低真空下或氢气保护下,加压校正可减少导轨的弯曲变形。冷热循环处理和工序间的热时效,可降低并稳定工件内的残余应力,从而可减少导轨在精加工中以及工序周转与存放期间的变形。通过对导轨热处理变形的原因和影响因素的分析,提出并采取了减少变形的措施。
Seven kinds of precision guide rails made of nitrided steel and bearing steel in the lithography machine and the laser precision workbench were subjected to stress relief annealing experiments of oil bath aging, ammonia gas, hydrogen and low vacuum protection. It was concluded that vacuum annealing can be sufficiently eliminated Residual stress machining, and reduce the deformation of the rail final heat treatment results. In the temperature of 520 ~ 560 ℃ under low vacuum or hydrogen protection, pressure correction can reduce the rail bending deformation. Hot and cold cycle processing and thermal aging between processes can reduce and stabilize the residual stress in the workpiece, which can reduce the rail in the finishing and the process of working and storage during deformation. Through the analysis of the causes and influencing factors of the heat treatment deformation of the guide rail, the measures to reduce the deformation are proposed and taken.