本文简要描述了激光检测摩擦力显微镜的工作原理,探索出一种横向力标定的有效方法,可以从横向力信号中提取摩擦力信号,从而能够定量地对试样表面的形貌和力学性质进行纳米量级的评定,以获取微观表面真实的三维形貌图和微观摩擦系数等信息,为纳米摩擦学设计提供依据.实验结果表明,用该方法测得未清洗单晶硅表面的微观摩擦系数约为0.06,和Bhushan等人的结果吻合的很好. This paper briefly describes the working principle of the laser detection friction microscope and explores an effective method of lateral force calibration, which can extract the friction signal from the lateral force signal so that the morphology and mechanical properties of the sample surface can be quantified quantitatively Nanometer order to get the real three-dimensional topography and micro-friction coefficient of the micro-surface and provide the basis for the nano-tribological design.The experimental results show that the micro-friction coefficient About 0.06, which is in good agreement with the result of Bhushan et al.