In this paper,we firstly review the carbon layered surface prepared with electron cyclotron resonance (ECR) plasma sputtering. Secondly,the friction behavior of carbon layered surface under pin-on-disk testing is described. Furthermore,the contact stress evolution processes of layered surface with and without transfer layer during wear are given for understanding the contact mechanisms. Finally,a three-dimension (3D) local yield map of layered surface is introduced,which is useful to predict the possible contact mechanisms. In this paper, we were review the carbon layered surface prepared with electron cyclotron resonance (ECR) plasma sputtering. The friction behavior of carbon layered surface under pin-on-disk testing is described. surface, and without transfer layer during wear are given for understanding the contact mechanisms. Finally, a three-dimension (3D) local yield map of layered surface is introduced, which is useful to predict the possible contact mechanisms.