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本文介绍一种新的在超高真空装置内测量样品上气体覆盖度的方法:时间相关离子散射谱(TDISS).作者使用100 eV的He~+离子入射,测量了不同暴露量的氧、CO、丙烯和氢在Rh(111)表面上的覆盖度.使用前三种气体的实验取得了满意的结果,可以迅速地获得吸附等温线形式的气体暴露量和覆盖度间的关系曲线;氢覆盖度的测量效果不理想,原因在于入射离子对其强溅射作用.文中分析了这一方法的优缺点,并预示了下一步工作的方向,即将此法的应用推广到多晶、薄膜、粉末样品及多组元样品.
In this paper, we introduce a new method for measuring gas coverage on ultrahigh vacuum devices: time-dependent ion scattering spectroscopy (TDISS). The authors used 100 eV He ~ + ions to measure the oxygen and CO , Propylene and hydrogen coverage on the surface of Rh (111). Satisfactory results were obtained with the first three gases and the relationship between the gas exposure and the coverage in the form of the adsorption isotherm can be quickly obtained; the hydrogen coverage The result of the measurement is not satisfactory because of the strong sputtering effect of incident ions.The advantages and disadvantages of this method are analyzed and the direction of the next step is forecasted.The application of this method is extended to polycrystalline, Samples and multi-component samples.