一、概述表面及微区分析,其目的是要对固体表面和内界面或微区的化学成分进行分析,以及对晶体结构、形貌和电子态进行研究。内界面主要指晶界,相界和层错等界面。在一个什么样的厚度,算作表面分析的范围,目前尚没有一个严格的定义。一般,表面指的是固体表面几个到几千个原子的薄层,即百万分之几到万分之几mm厚的浅表层。这一原子层的结构、成分和性质与其他部分可能有所不同,物体表面的这些特性,对它的许多物理化学性质影响极 An overview of surface and micro-area analysis, its purpose is to analyze the chemical composition of the solid surface and the inner interface or micro-region, as well as the crystal structure, morphology and electronic state research. The inner interface mainly refers to the grain boundary, phase boundary and fault interface. In what kind of thickness, counted as the scope of surface analysis, there is not a strict definition. In general, the surface refers to a few to thousands of atoms on the solid surface of the thin layer, that is, parts per million to a few millionths of a million thick superficial layer. The structure, composition and nature of this atomic layer may be different from other parts. These characteristics of the surface of an object have a great influence on many of its physicochemical properties