论文部分内容阅读
评述现有国产扩散泵产品的进展情况 ,存在的不足之处 ,今后应努力改进的方向。讨论测量扩散泵返油率的几种方法 ,提出采用石英晶体振荡器测量扩散泵返油率的新建议
Comment on the progress of the existing domestic diffusion pump products, the existing shortcomings, the future efforts should be made to improve the direction. Discuss several methods to measure the oil return rate of the diffusion pump and put forward the new proposal of using the quartz crystal oscillator to measure the oil return rate of the diffusion pump