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介绍了四象限探测器的工作原理及影响四象限探测系统精度的各种内外部因素,详细分析了四象限探测器死区对探测范围内探测灵敏度的影响。在探测范围内,对各个象限内高斯光斑接收的光功率进行计算,并用Matlab软件对归一化的目标光斑偏移量x随光斑中心坐标X的变化关系进行仿真,设计四象限探测系统的光路和电路,当死区宽度D=0.1mm时,调整光斑半径R大小分别为0.6mm和0.4mm下进行测量。理论及实验结果表明,死区宽度相对光斑半径的比例越大,光斑偏移量随光斑中心的变化趋势越陡峭,探测器的灵敏度越高。
The working principle of four-quadrant detector and the various internal and external factors that affect the accuracy of the four-quadrant detection system are introduced. The influence of the dead zone of four-quadrant detector on the detection sensitivity in the detection range is analyzed in detail. In the detection range, the received optical power of each Gaussian spot in each quadrant is calculated, and the relationship between the normalized target spot offset x and the spot center coordinate X is simulated by using Matlab software. The optical path of the four-quadrant detection system is designed And the circuit, when the dead zone width D = 0.1mm, adjust the spot radius R size were 0.6mm and 0.4mm under the measurement. Theoretical and experimental results show that the larger the ratio of the width of the dead zone to the spot radius, the steeper the variation of the spot offset with the center of the spot, the higher the sensitivity of the detector.