论文部分内容阅读
本文设计了一维金属基压电扫描振镜并进行了性能测试.该振镜利用金属微铰链梁将压电振子的伸缩振动转化为硅反射镜的旋转振动,具有扫描角度大、可靠性高、成本低廉的特点.首先,建立了压电振镜的有限元模型,通过模态分析和谐振响应分析得到了振镜的谐振模态以及扫描角度极限随铰链梁尺寸和位置的变化关系.接着,制备了由压电振子、钢片基底和硅反射镜组成的振镜样机.最后,对振镜的幅频特性进行了性能测试.结果表明:2 mm×2 mm的反射镜在120V_(pp)的电压驱动下可在谐振频率5.34 k Hz处产生21°的扫描角度.随着驱动电压幅值的增加,一阶扭转谐振频率会略微下降.振镜样机Q值达144,扫描角度与驱动电压幅值呈线性关系.该振镜具有较大的镜面尺寸和扫描角度,制作工艺简单、抗冲击性能好,可满足流式细胞扫描成像高分辨率和模块化、批量化的应用需求.
In this paper, a one-dimensional metal-based piezoelectric scanning galvanometer was designed and tested, and the performance of the galvanometer was studied.It uses the metal micro-hinge beam to convert the telescopic vibration of the piezoelectric vibrator into the rotational vibration of the silicon mirror with large scanning angle and high reliability , Low cost.Firstly, the finite element model of piezoelectric galvanometer was set up, and the resonant mode of the galvanometer and the relationship between the limit of scanning angle and the size and position of the hinge beam were obtained through modal analysis and resonance analysis. , A galvanometer prototype consisting of a piezoelectric vibrator, a steel substrate and a silicon mirror was prepared. Finally, the amplitude-frequency characteristics of the galvanometer were tested. The results show that the 2 mm × 2 mm reflector has the best performance at 120V pp ) Can drive a scanning angle of 21 ° at a resonant frequency of 5.34 k Hz. The first-order torsional resonant frequency decreases slightly with the increase of the driving voltage amplitude. The Q value of the galvanometer prototype reaches 144, and the scanning angle and the driving The voltage amplitude has a linear relationship.This galvanometer has a large mirror size and scanning angle, the production process is simple, impact resistance is good, to meet the high-resolution and modular, batch application requirements of flow cytometry.