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Al在ZrN薄膜中的存在形式与Al含量密切相关,由此导致ZrAlN薄膜的韧性改变。本文发现了一定成分的ZrAlN薄膜同时具备高硬度和高韧性的现象。采用磁控溅射技术在钛合金和单晶Si上沉积不同Al含量的ZrAlN薄膜,测试了硬度(H)、弹性模量(E)和断裂韧性(KIC),表征了微观组织、相结构,阐明了性能变化机理。采用纳米压入仪测试H和E;压入法及小能量多冲法评价了KIC;采用场发射扫描电镜(FESEM)观察截面形貌,X射线衍射(XRD)分析物相结构。实验发现:当向Zr N薄膜(18.9 GPa)中加入5at%,23at%,47at%和63at%Al后,对应硬度分别是24.5,40.1,17.1和19.1 GPa;对应断裂韧性分别是1.47,3.17,1.13和1.58 MPa·m-0.5,即23at%Al的薄膜同时具备最高的硬度(40.1 GPa)和最高的韧性(3.17 MPa·m-0.5)。XRD表明,5at%和23at%Al固溶到Zr N晶粒中,形成Na Cl型面心立方(FCC)结构,而47at%和63at%Al则形成纤锌矿密排六方(HCP)Al N第二相。采用两种方法定量地评价了薄膜的韧性。
The presence of Al in the ZrN film is closely related to the Al content, resulting in a change in the toughness of the ZrAlN film. This article found that a certain composition of ZrAlN film with both high hardness and high toughness phenomenon. ZrAlN films with different Al contents were deposited on titanium alloy and monocrystalline Si by magnetron sputtering. The hardness (H), elastic modulus (E) and fracture toughness (KIC) were measured. The microstructure, phase structure, Clarified the mechanism of performance change. H and E were tested by nanoindenter. The KIC was evaluated by pressing method and small energy multi-pulse method. The morphology of the cross section was observed by field emission scanning electron microscopy (FESEM) and the phase structure was analyzed by X-ray diffraction (XRD). The experimental results show that the corresponding hardness is 24.5, 40.1, 17.1 and 19.1 GPa, respectively, when 5at%, 23at%, 47at% and 63at% Al are added into the ZrN film (18.9GPa); the corresponding fracture toughnesses are 1.47, 3.17, 1.13 and 1.58 MPa · m-0.5, that is, the film with 23 at% Al has the highest hardness (40.1 GPa) and the highest toughness (3.17 MPa · m-0.5). XRD shows that 5at% and 23at% Al form solid solution into ZrN grains and form a NaCl FCC, while 47at% and 63at% Al form wurtzite hexagonal (HCP) AlN Second phase Two methods were used to quantitatively evaluate the toughness of the film.