超短脉冲激光烧蚀金属薄膜材料的热效应分析

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基于双曲双温两步热传导模型,利用具有人工粘性和自适应步长的有限差分算法,对超短脉冲激光辐照金膜时的温度场进行了一维数值模拟计算。讨论了不同能量密度和脉冲宽度条件下金膜表面温度场的分布情况;分析了电子-晶格耦合系数对薄膜体内温度场的变化规律及电子-晶格耦合至热平衡所需时间的影响。结果表明.激光脉冲的能量密度和脉冲宽度对电子温度的峰值有重大影响;电子-晶格的耦合系数决定了二者的温升速率和耦合时间;电子温度及电子温度的梯度在接近表面区域迅速达到最大值,与之相应的热电子崩力是造成金属薄膜早期力学损伤的主要原因。 Based on the hyperbolic and two-temperature two-step heat conduction model, the finite difference algorithm with artificial viscosity and adaptive step is used to simulate the temperature field of the ultra-short pulse laser irradiated gold film. The distribution of the temperature field on the surface of the gold film under different energy density and pulse width is discussed. The variation of the temperature field of the film coupled with the electron-lattice coupling coefficient and the influence of the time required for the electron-crystal lattice coupling to the thermal equilibrium are analyzed. The results show that the energy density and pulse width of laser pulse have a significant effect on the peak of electron temperature. The electron-lattice coupling coefficient determines the rate of temperature rise and the coupling time. The gradient of electron temperature and electron temperature is close to the surface area Rapidly reaching the maximum, the corresponding thermal electron collapse force is caused by the early mechanical damage of the metal film the main reason.
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