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传统的电荷耦合器件(CCD),在400nm以下CCD的量子效率太低,而传统的基于CCD的紫外增强技术可以提高CCD对紫外波段的响应,但是存在光谱信号弱的缺点,并且系统分辨率也因此降低。一种自行研制的CCD紫外荧光增强技术,其创新在于去除CCD表面保护玻璃,通过真空镀膜的方法将晕苯直接沉积在CCD敏感元件表面,能有效地提高CCD的紫外响应度,并削弱薄膜对分辨率的影响。对于离散谱线,253.6nm波长的相对强度提高10倍。对于连续谱线,紫外波段的信号也得到明显增强,截止频率从290nm降至220nm。该种方法制作紫外CCD成本不高,可以实现批量生产,适合工业应用。
The traditional charge-coupled device (CCD), the quantum efficiency of the CCD below 400nm is too low, while the traditional CCD-based UV enhancement technology can improve the response of the CCD to the UV band, but there is the disadvantage of weak spectral signal, and the system resolution So lower. A self-developed CCD UV fluorescence enhancement technology, its innovation lies in the removal of the CCD surface protection glass, by vacuum deposition method corona benzene deposited directly on the CCD sensor surface, which can effectively improve the UV response of CCD and weaken the film pairs Effect of resolution. For discrete spectral lines, the relative intensity of the 253.6 nm wavelength is increased by a factor of 10. For the continuous spectrum, the UV signal has also been significantly enhanced, cutoff frequency from 290nm to 220nm. The method of making UV CCD is not expensive, can achieve mass production, suitable for industrial applications.