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一、引言 自从五十年前晶体管发明以来,微电子技术无论是从其发展速度和对人类社会生产和生活的影响,都可以说是科学技术史上空前的。微电子技术支撑的微电子产业飞速发展,成为信息产业的基础,其全球的销售额高达2000亿美元。三十多年来,为了提高电子集成系统的性能,降低成本,器件的特征尺寸不断缩小,制作工艺的加工精度不断提高,同时硅片的面积也在不断增大。IC芯片的集成度大体每隔一年半增长一倍,性能随之提高,IC的特征尺寸
I. INTRODUCTION Since the transistor was invented 50 years ago, microelectronics technology can be said to be unprecedented in the history of science and technology both in terms of its speed of development and its impact on the production and life of human society. The microelectronics industry supported by microelectronics technology has developed rapidly and has become the foundation of the information industry with global sales of up to 200 billion U.S. dollars. In the past 30 years, in order to improve the performance of electronic integrated system and reduce the cost, the feature size of the device is continuously reduced, the processing precision of the manufacturing process is continuously improved, and the area of the silicon wafer is also continuously increasing. IC chip integration roughly doubling every year and a half, the performance increases, the IC’s feature size