阐述了照明光学系统在分步投影光刻机中的重要作用，介绍了当采用部分相干光照明时相干度对分辨率的影响，以及Ｋｏｈｌｅｒ照明中聚光镜像差对成像的影响，同时也介绍了离轴照明（ＳＨＲＩＮＣ照明和环形照明）对改善分辨率和焦深的作用，最后扼要介绍综合照明系统和变焦距照明光学系统。 The important function of illumination optical system in step projection lithography machine is expounded. The influence of coherence on resolution when using partially coherent light illumination and the effect of condenser aberration on Kohler illumination are also introduced Off-axis illumination (SHRINC illumination and ring illumination) for improved resolution and depth of focus, and finally a summary of the integrated illumination system and zoom illumination optics.