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本文介绍一种偏振光干涉下测量激光束1.06μm发散角的方法和装置,对此方法的工作原理、结构特征、测量精度分析作了详细的阐述,并给出了几种测量装置的最佳组合及其测量精度
In this paper, a method and device for measuring 1.06μm divergence angle of laser beam under the interference of polarized light are introduced. The working principle, structural characteristics and measurement accuracy of this method are described in detail. Good combination and its measurement accuracy