大载荷下线振动微机械陀螺谐振频率漂移特性

来源 :中国惯性技术学报 | 被引量 : 0次 | 上传用户:wangj30
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线振动MEMS陀螺在大载荷条件下,驱动轴与检测轴的谐振频率会发生漂移,频差随载荷变大。这类型振动陀螺为了提高灵敏度往往将两个振动轴的谐振频率设计得尽量靠近,但当角速率载荷较大时,两个振动轴的谐振频率将发生分裂漂移,彼此互相远离。漂移量与向心加速度无关,近似与角速率载荷的平方成正比,且两轴的谐振频率越靠近漂移越剧烈。考虑到Coriolis效应的弹簧质量块二维振动数学模型可定量描述该现象,表明此现象为线振动陀螺Coriolis效应的一部分。理论分析、仿真研究和实验数据的不同角度对这种频率漂移特性的分析结果吻合良好,为进一步结构优化奠定了理论基础。 Under the condition of large load, the resonant frequency of the drive shaft and the detection axis will drift and the frequency difference will increase with the load. In order to improve the sensitivity of this type of vibrating gyroscope, the resonant frequencies of the two vibrating axes are often designed to be as close as possible. However, when the angular rate load is large, the resonance frequencies of the two vibrating axes will split and drift away from each other. The drift is independent of the centripetal acceleration and is approximately proportional to the square of the angular rate load, and the closer the resonance frequency of both axes to the more violent the drift. This phenomenon is quantitatively described by a two-dimensional mathematical model of the spring mass that takes into account the Coriolis effect, indicating that this phenomenon is part of the Coriolis effect of the linear vibrating gyroscope. Theoretical analysis, simulation and experimental data from different angles of the frequency drift analysis of the results of the agreement is good, and laid the theoretical foundation for further structural optimization.
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