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一、前言所谓“超精密加工”就其范围来说,由于加工的难易程度不仅决定于加工精度,还决定于加工形状特点(大小、加工余量、加工时的装夹方法、球面加工、非球面加工、轴端加工)、工件材料(金属、非金属、塑性材料、硬脆材料)和使用刀具(金刚石、立方氮化硼、砂轮、磨料)等,所以没有严格地规定。一般大致认为,数量级在10~(-7)～10~(-9)米的范围内。作为镜面加工精度,要求形状精
First, the foreword The so-called “ultra-precision machining” in terms of its scope, due to the ease of processing not only depends on the processing accuracy, but also decided to shape the processing characteristics (size, machining allowance, machining clamping, spherical processing, Non-spherical machining, shaft end machining), workpiece materials (metal, non-metallic, plastic materials, hard and brittle materials) and the use of tools (diamond, cubic boron nitride, grinding wheel, abrasive), so there is no strict rules. It is generally accepted that the order of magnitude is in the range of 10 -7 to 10 -9. As a mirror processing precision, requires the shape of fine