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在大气气氛下,采用连续CO2激光和氮等离子体混合法(LPN)对工业纯钛样品表面进行处理,获得了氮化钛膜层。用扫描电镜(SEM),X射线衍射(XRD)对样品的形貌和结构进行了表征,结果表明在合适的条件下可以获得满意的氮化效果。在激光功率密度2.0×105~1.0×106W/cm2,扫描速度200~1000 mm/min的区间内,激光功率密度越高,扫描速度越低,氮化效果越好。工业纯钛样品的氮化深度最佳可达80μm。在有效氮化区域内,氮含量随深度变化迅速,而在过渡区域内,氮含量变化缓慢。
In the atmosphere, the surface of industrial pure titanium was treated by continuous CO2 laser and nitrogen plasma mixing (LPN) to obtain the titanium nitride film. The morphology and structure of the samples were characterized by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The results show that the nitriding effect can be obtained under the proper conditions. In the range of laser power density of 2.0 × 105 ~ 1.0 × 106W / cm2 and scanning speed of 200 ~ 1000 mm / min, the higher the laser power density and the lower the scanning speed, the better the nitriding effect. Nitriding depth of industrial pure titanium samples can reach 80μm. In the effective nitriding region, the nitrogen content changes rapidly with depth, while in the transitional region, the nitrogen content changes slowly.