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基于半导体式气体传感原理,提出了利用MEMS技术将电化学生长的Al2O3膜加工成微热板结构载体,采用平面薄膜工艺制做Pt薄膜加热电阻和信号电极。在微热板的2个电极上,涂敷γ-Fe2O3-SnO2-Pt-Pd形成煤油蒸气敏感单元,实现在微结构体上气体检测的二单元集成。传感器采用脉冲工作方式,工作周期为30 s,在加热峰值形成高温400℃的煤油检测条件。测试结果表明:煤油(标志物:癸烷)检测可实现体积分数(0～7000)×10-6范围,90%的吸附响应时间小于8s,脱附响应时间小于12s,传感器信号输出与煤油体积分数有对应的全对数线性关系。
Based on the principle of semiconductor gas sensing, the electrochemical deposition of Al2O3 film into the micro-thermal plate structure carrier by MEMS technology is proposed. The thin film heating resistor and signal electrode are fabricated by the planar film process. On the two electrodes of the micro-hot plate, γ-Fe2O3-SnO2-Pt-Pd is coated to form a kerosene vapor sensing unit to realize two-unit integration of gas detection on the microstructure. The sensor uses a pulse mode of operation, the working period of 30 s, kerosene detection conditions at a peak heating temperature of 400 ℃. The test results show that the detection of kerosene (marker: decane) can realize the volume fraction (0-7000) × 10-6, the 90% adsorption response time is less than 8s and the desorption response time is less than 12s. The sensor signal output is proportional to the kerosene volume The scores have corresponding full logarithmic linear relationships.