论文部分内容阅读
在成功地外延生长超导、铁电、铁磁等多种性质的钙钛矿结构氧化物薄膜的基础上，讨论影响氧化物薄膜外延生长的一些因素．考虑到相形成和薄膜生长动力学，在利用脉冲激光淀积法外延生长氧化物薄膜中衬底温度是十分重要的工艺参数．衬底温度对成相和生长薄膜的取向都有影响．考虑到薄膜是首先在衬底表面成核、成相并生长．因此衬底材料晶格的影响是不容忽视的．观察到衬底材料对薄膜外延生长温度的影响．在适当的工艺条件下，利用低温三步法工艺制备得到有很强织构的外延薄膜．这突出表明界面层的相互作用对钙钛矿结构薄膜的取向有着相当大的影响．
On the basis of successful epitaxial growth of superconducting, ferroelectric, ferromagnetic and other properties of perovskite oxide films, some factors that affect the epitaxial growth of oxide films are discussed. Considering phase formation and film growth kinetics, it is very important process parameters to epitaxially grow the substrate temperature in an oxide film by pulsed laser deposition. The substrate temperature has an effect on the phase orientation and orientation of the growth film. Taking into account the film is the first surface of the substrate nucleation, phase and growth. Therefore, the influence of the lattice of the substrate material can not be ignored. The influence of the substrate material on the epitaxial growth temperature of the film was observed. Under proper process conditions, the epitaxial film with strong texture is prepared by the low temperature three-step process. This highlights that the interfacial interaction has a considerable effect on the orientation of the perovskite-structured films.