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以La2O3,HNO3和H3PO4为原料,采用溶胶-凝胶法制备了LaP5O14粉体。用热重-差示扫描量热仪,X射线衍射和扫描电子显微镜研究了原料的组成以及热处理工艺等因素对煅烧后粉体的组成、微观形貌和性能的影响,探讨了LaP5O14粉体的合成机理。结果表明:当La2O3与H3PO4摩尔比为1:5时制备的凝胶,在800℃煅烧5h后,制得主晶相为柱状结构的LaP5O14粉体,该粉体的粒径约10μm。LaP5O14粉体以LaPO4为前驱体在煅烧过程中通过P2O5的蒸发凝聚机理形成。该粉体能够在850℃分解并均匀释放出P2O5,LaP5O14的质量损失与时间近似于线性关系,可用于制备硅晶片掺杂用磷扩散源片。
The LaP5O14 powders were prepared by sol-gel method using La2O3, HNO3 and H3PO4 as raw materials. The effects of the composition of the raw materials and the heat treatment process on the composition, morphology and properties of the calcined powders were investigated by TG-DSC, X-ray diffraction and scanning electron microscopy. The effects of LaP5O14 powders Synthesis mechanism. The results show that when the molar ratio of La2O3 to H3PO4 is 1: 5, calcined at 800 ℃ for 5h, a LaP5O14 powder with the main crystal phase as columnar structure is obtained. The particle size of the powder is about 10μm. LaP5O14 powder is formed by the evaporation and aggregation mechanism of P2O5 during the calcination process using LaPO4 as precursor. The powder can decompose and uniformly release P2O5 at 850 ℃. The mass loss of LaP5O14 is approximately linear with time, and can be used to prepare phosphorus diffusion source chips for silicon wafer doping.