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使用自行设计的超高真空金属系统和气体样品净化装置,以引进的Gastrace-s型气体分析四极质谱计为分析器,以纯度为999%的3He和4He气体为标准气样,对微量气体样品中He同位素的四极质谱峰高比测定法进行了实验研究。结果表明,Zr-Al活性气体吸收剂能在390s内将活性杂质气体含量为40.7%的3He气体样品净化到接近100%。当He进样量>5×10-7ml.atm时,仪器灵敏度稳定,S(3He)/S(4He)=0.41,在本系统中,仪器对He原子的探测极限达到了1010。
Using the self-designed ultra-high vacuum metal system and the gas sample purification device, with the introduction of Gastrace-s gas analysis quadrupole mass spectrometer as the analyzer, with 3He and 4He gas of 999% purity as the standard gas sample, The quadrupole mass spectrometry peak height ratio of He isotope in the sample was tested. The results show that the Zr-Al active gas absorbent can purify the 3He gas sample with the active impurity gas content of 40.7% to nearly 100% in 390 s. When He injection volume> 5 × 10-7ml. Atm, the sensitivity of the instrument is stable, S (3He) / S (4He) = 0.41. In this system, the detection limit of the instrument to He atom reaches 1010.