【摘 要】
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Compositionally graded Ba1-xSrxTiO3 (BST) (x = 0-0.3) thin films were prepared on Pt/Ti/SiO2/Si substrate at different substrate temperatures ranging from 550
【机 构】
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School of Physics and Electronic Technology
论文部分内容阅读
Compositionally graded Ba1-xSrxTiO3 (BST) (x = 0-0.3) thin films were prepared on Pt/Ti/SiO2/Si substrate at different substrate temperatures ranging from 550 ℃ to 650 ℃ by radio-frequency (rf) magnetron sputtering. The effect of substrate temperature on the preferential orientation,microstructures and dielectric properties of compositionally graded BST thin films was investigated by X-ray diffraction,scanning electron microscopy and dielectric frequency spectra,respectively. As the temperature increases,the preferential orientation evolves in the order: randomly orientation→ (111) → highly oriented (111) (α(111) = 60.2%). The surface roughness of the graded BST thin films varies with the substrate temperatures. No visible internal interface in the compositionally graded thin films can be observed in the cross-sectional SEM images. The graded BST thin films deposited at 650 ℃ possess the highest dielectric constant and dielectric loss,which are 408 and 0.013,respectively.
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