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基于力校正的主动支撑技术已广泛应用于光学镜面支撑,而基于力矩校正的方法目前还鲜有研究,为了深入探讨该课题,在传统力促动器主动支撑的基础上引入了基于力矩校正的反射镜主动支撑。首先,从镜面主动支撑原理出发,介绍了镜面面形主动校正的分类,着重对比分析了力校正和力矩校正的优缺点。进而,根据力矩主动校正的特点,利用在反射镜背部施加3组等效力矩的方法,对一块400 mm口径的轻量化反射镜进行了静力学分析与优化,拟合后镜面变形RMS值由原来的331 nm降为9.35 nm,优化率为97%。分析结果表明,基于力矩校正的主动支撑是有效的,同时为主动支撑的智能化及多样化提供了一种新的思路。
The active support technology based on force correction has been widely used in optical mirror support. However, there are few researches on the method of moment correction based on force correction. In order to further explore this subject, the traditional method based on active force support is introduced, Active mirror support. First of all, based on the principle of mirror active support, the classification of mirror face active correction is introduced. The advantages and disadvantages of force correction and torque correction are analyzed emphatically. Furthermore, according to the characteristics of active torque correction, the static analysis and optimization of a piece of 400 mm diameter lightweight mirror with three sets of equivalent torque on the back of the mirror were performed. After fitting, the RMS value of the mirror deformation was changed from the original 331 nm reduced to 9.35 nm, the optimization rate of 97%. The analysis results show that the active support based on moment correction is effective, and a new idea is provided for the intelligent and diversified initiative support.