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我们在ＳＴＯ台阶基片上，采用脉冲激光沉积（ＰＬＤ）和直流磁控溅射法制备出ＹＢＣＯ外延超导薄膜，采用普通的光刻技术得到ＤＣＳＱＵＩＤ图形．器件的ＩＶ曲线具有ＲＳＪ模型描述的上翘特征；三角波调制幅度峰峰值大于４μＶ，磁场灵敏度优于１ｐＴ／Ｈｚ（白噪声区）；９个不同基片上的样品磁通锁定的成品率达到６７％．
We fabricated YBCO epitaxial superconducting thin film on the STO step substrate by using pulsed laser deposition (PLD) and DC magnetron sputtering, and obtained the DC-SQUID pattern by ordinary lithography. The I-V curve of the device has the upturned characteristics described by the RSJ model. The peak-to-peak amplitude of the triangular wave is greater than 4μV and the sensitivity of the magnetic field is better than 1pT / Hz (white noise region). The yield of sample flux locking on nine different substrates reaches 67%.