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介绍了一种小型共焦成像仪,它由高性能的双轴硅转矩镜组成,转矩镜协同动态抛物面薄膜反射镜提供三维光束扫描。光束扫描驱动器置于探测火星岩石和土壤用的共焦拉曼光谱仪上,此光谱仪光学分辨率在850um波长上为1μm,视场为300μm,焦距控制大于200μm。使用双轴扫描仪获得了快速平面扫描,同时抛物面薄膜镜为仪器提供静态和动态聚焦控制(z轴),其中也包括空间场及地表轮廓纠正。本文也描述了MOEM(微光机电)部件以及整体仪器结构,给出了采用转矩镜扫描器获得的原始图像。并且简述了动态聚焦部件的制备、模拟和主要实验表征。
A compact confocal imager is introduced. It consists of a high-performance, two-axis silicon torque mirror that provides a three-dimensional beam scan in conjunction with a dynamic parabolic membrane mirror. The beam scan driver was placed on a confocal Raman spectrometer used to detect Mars rocks and soil. The optical resolution of the spectrometer was 1 μm at 850 μm wavelength, the field of view was 300 μm, and the focal length was controlled to more than 200 μm. Fast planar scanning is achieved using a dual-axis scanner, while parabolic mirrors provide both static and dynamic focus control (z-axis) to the instrument, including space fields and surface contour correction. This article also describes the MOEM components as well as the overall instrumentation structure, giving the original image obtained with a torque mirror scanner. The preparation, simulation and main experimental characterization of dynamic focusing components are also briefly described.