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以化学共沉淀法制备的ITO粉末为原料,采用喷雾干燥-冷等静压-烧结法制备了ITO靶材,通过扫描电子显微镜(SEM)观察粉末、素坯及烧结后ITO靶材的表面形貌和气孔分布,并就粉末不同粒度组成对靶材压制与烧结效果的影响进行了分析。实验结果表明:通过喷雾干燥-冷等静压-烧结工艺可制备出相对密度大于97%的ITO靶材,喷雾干燥工序能有效改善粉末的流动性与压形性,以细粉为主的素坯其烧结致密化程度更高。
ITO powder prepared by chemical coprecipitation method was used as raw material. The ITO target material was prepared by spray-drying-cold isostatic pressing-sintering method. The surface morphology of powder, green body and sintered ITO target was observed by scanning electron microscope (SEM) Appearance and pore distribution, and analyzed the effect of different particle sizes of powder on the target pressing and sintering effect. The experimental results show that the spray drying - cold isostatic pressing - sintering process can produce ITO target with the relative density greater than 97%. The spray drying process can effectively improve the powder flowability and compactness, Billet is more densely sintered.