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一、引言校准低于10~(-2)帕的电离规时要确定“电离规系数”或“灵敏度系数”。这两个术语在国际标准化组织(ISO)的词汇草案 ISO/DIS3529/111中定义为:1.电离规系数(与美国真空学会标准AVS6.4—1969定义的“规管校准系数”相
I. INTRODUCTION To calibrate the ionization gauge below 10 ~ (-2) Pa must determine the “ionization coefficient” or “sensitivity coefficient”. These two terms are defined in the International Organization for Standardization (ISO) Glossary ISO / DIS3529 / 111 as: 1. The ionospheric coefficient (as compared to the “regulated calibration coefficient” defined by the American Society of Vacuum Standards AVS 6.4-1969