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总结了各种DLC膜的热稳定性及分析手段 ,概述了加热退火情况下DLC膜结构、内应力的变化 ,评述了国内外的最新研究进展 ,并指出了有待进一步研究的问题
The thermal stability and analysis methods of various DLC films were summarized. The structure and internal stress of DLC films under the condition of heating annealing were summarized. The latest research progress at home and abroad were reviewed, and the problems to be further studied were pointed out