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在介电常数符号相反的两个材料的界面处可激发出表面等离子体激元 (Surface plasmon)。文中利用普通扫描电子显微镜中出现的电子束诱导沉积纳米碳基本现象 ,提出和发展了一种无需光刻胶和额外掩模的亚微米图形化技术。采用这一新方法 ,成功地在镀金的半导体 In Ga Al P量子阱表面制备了各种亚微米点阵结构 ,并得到基于二维表面等离子体激元的可见波段半导体发光的增强作用
Surface Plasmon can be excited at the interface of two materials with opposite permittivity symbols. In this paper, the fundamental phenomena of nanocarbon deposition induced by electron beam appeared in common scanning electron microscope, a submicron patterning technology without photoresist and additional mask is proposed and developed. With this new method, various submicron lattice structures were successfully fabricated on gold-plated semiconductor InGaAlP quantum wells, and the enhancement of visible band semiconductor emission based on two-dimensional surface plasmon polaritons