真空联锁保护系统的设计

来源 :中国原子能科学研究院年报 | 被引量 : 0次 | 上传用户:yuhmmmmm
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中国原子能科学研究院串列加速器每年承担宇航微电子器件重离子单粒子效应试验近千小时,试验期间需要频繁破坏真空更换微电子器件,为保障加速器设备安全运行,本年度课题组针对重离子单粒子效应试验运行平台进行了真空联锁保护系统设计。真空联锁保护控制系统一方面利用真空计控制单元中的继电器来控制真空阀门(慢阀,一般关闭时间1~3 s)的关闭,来有效防止真空慢泄漏事故的发生;另一方面,针对膜窗等的使用,有可 China Institute of Atomic Energy tandem accelerator every year to undertake aerospace heavy-ion single-particle effect test of microelectronics devices for nearly 1,000 hours during the test need to frequently destroy the vacuum replacement of microelectronic devices, in order to protect the accelerator device safe operation, this year’s research group for heavy ion single particles Effect test run platform for a vacuum interlock protection system design. On the one hand, the vacuum interlock protection control system uses the relay in the vacuum gauge control unit to control the closing of the vacuum valve (slow valve, normally closed time 1 ~ 3 s) to effectively prevent the occurrence of a vacuum slow leak; on the other hand, Membrane windows, the use of available
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