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To investigate the change of the mechanical properties of soft metals doped PVD (Physical Vapor Deposition) coatings after the migration of soft metal to the surface,TiN-Cu coating was deposited on Si(100)by magnetron sputtering.The microstructure and mechanical properties at room temperature and after vacuum heat treatment at 300°C were investigated.The results showed that the grains were clustered and the microstructure was porous for TiN-Cu coating at room temperature,while many micro-and nano-sized Cu particles were observed on the surface after vacuum heat treatment at 300°C.The elastic properties of the TiN-Cu coating after vacuum heat treatment at 300°C degraded compared with that at room temperature.The hardness and elasticity modulus of TiN-Cu coating kept constant(3.7 GPa and 125.0 GPa,respectively)with the increase of nano-indentation depth,while the hardness and elasticity modulus of TiN-Cu coating after vacuum heat treatment at 300°C increased gradually.