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MEMS毫米波相移器是MEMS毫米波相控阵天线的关键部件之一,它的性能直接决定了毫米波相控阵天线的性能。该文介绍毫米波MEMS相移器的设计,研究低损耗衬底,Au,AlxSi1-x可动膜对下拉电压和传输损耗的影响,测试表明:21桥相位连续可调的分布式压控开关阵列一毫米波相移器在35GHz时,启动电压5V,20V时相移量达到372°/3.5 mm,并能在不同的控制电压下根据要求改变相移量。
MEMS millimeter wave phase shifter is one of the key components of MEMS millimeter wave phased array antenna. Its performance directly determines the performance of the millimeter wave phased array antenna. This paper introduces the design of millimeter-wave MEMS phase shifter, and studies the influence of low loss substrate, Au, AlxSi1-x movable film on the pull-down voltage and transmission loss. The test shows that the 21 phase controlled continuously distributed distributed voltage controlled switch At 35 GHz, the array millimeter-wave phase shifter has a start-up voltage of 5 V and a phase shift of 372 ° / 3.5 mm at 20 V, and the amount of phase shift can be changed as required under different control voltages.