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利用X射线衍射, X射线吸收精细结构谱和高分辨电镜研究了激光刻蚀工艺对 Al2O3-ZrO2固溶度和结晶度的影响．结果表明,Al2O3在ZrO2中的固溶度越大,ZrO2晶体结构无序度越大．样品室的空气压力越大,粉体中无定形相的含量越大．无定形ZrO2中存在短程有序-长程无序结构Zr-O—Zr(Al)．同Al2O3-ZrO2固溶体相比,无定形ZrO2具有更短的 Zr-O和Zr-Zr(Al)原子间距离和更大的无序度．
The influence of laser etching process on the solid solubility and crystallinity of Al2O3-ZrO2 was studied by X-ray diffraction, X-ray absorption fine structure spectroscopy and high resolution electron microscope. The results show that the greater the solid solubility of Al2O3 in ZrO2, the greater the disorder of ZrO2 crystal structure. The greater the air pressure in the sample chamber, the greater the amount of amorphous phase in the powder. There is a short-range order-long-range disorder Zr-O-Zr (Al) in amorphous ZrO2. Compared with the Al2O3-ZrO2 solid solution, amorphous ZrO2 has a shorter distance between Zr-O and Zr-Zr (Al) atoms and a greater degree of disorder.