为了使单色仪在极紫外-软X射线波段准确地进行波长扫描,需要对单色仪进行波长标定。单色仪的所有组件都放置在罗兰圆的圆周上,改变出射狭缝在罗兰圆上的位置,在单色仪的出射狭缝处就可以得到相应波长的单色光。通过测量标准He空心阴极光源的发射光谱,对Mcpherson247单色仪进行波长标定,并对实验结果进行了分析,得出在1~100nm波段内单色仪标定精度为±0.017nm~±0.097nm。 To make the monochromator accurately scan wavelengths in the EUV-soft X-ray range, the monochromator needs wavelength calibration. All components of the monochromator are placed on the circumference of the Rowland circle, changing the position of the exit slit on the Rowland circle. Monochromatic light of the corresponding wavelength can be obtained at the exit slit of the monochromator. By measuring the emission spectrum of a standard He hollow cathode light source, the wavelength of the Mcpherson247 monochromator was calibrated. The experimental results were analyzed. The calibration accuracy of the monochromator was from ± 0.017 nm to ± 0.097 nm in the band from 1 to 100 nm.