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为了实现纳米操作中的精确定位,提出了一种压电陶瓷驱动的线性尺蠖驱动器。这个驱动器主要由1个柔性机构和3个压电陶瓷构成,其中一个压电陶瓷用来提供驱动力,另外两个用来交替夹紧线性导轨以用来实现尺蠖运动。建立了反映该尺蠖电机运动特性的理论模型,通过有限元仿真评估驱动器的性能和验证模型的有效性,研究了柔性机构的变形行为和相应的最大应力。
In order to achieve the precise positioning in nano-operation, a piezoelectric ceramic driven linear scale driver is proposed. The drive is mainly composed of a flexible mechanism and three piezoelectric ceramics, one of which is used to provide the driving force and the other two are used to alternately clamp the linear guide rail to achieve the foot movement. A theoretical model reflecting the movement characteristics of the motor was established. The performance of the actuator was evaluated by finite element simulation and the validity of the model was verified. The deformation behavior and the corresponding maximum stress of the flexible mechanism were studied.