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用直流等离子体增强化学气相沉积(PCVD)方法在T225NG钛合金基体上制备出厚度约为6μm的TiN/TiN+Si/TiN多层膜,重点研究了多层膜及钛合金基材在室温和高温条件下的微动磨损行为,采用激光共焦扫描显微镜测定磨损体积,用扫描电子显微镜观察磨痕微观形貌.结果表明:在室温(25℃)至400℃范围内,微动初期和稳定阶段多层膜的摩擦系数比钛合金基体低,磨损体积也比钛合金基材明显降低;多层膜磨损体积随着温度的升高而增大;多层膜可以显著降低钛合金基材的磨损;多层膜的损伤主要表现为剥层和磨粒磨损形式.
The TiN / TiN + Si / TiN multilayers with a thickness of about 6μm were prepared on a T225NG titanium alloy by direct current plasma enhanced chemical vapor deposition (PCVD) method. The effects of multilayer and titanium alloy substrates on the The fretting wear behavior under high temperature was studied.The wear volume was measured by laser confocal scanning microscope and the microstructure of wear scar was observed by scanning electron microscope.The results showed that in the range of room temperature (25 ℃) to 400 ℃, The friction coefficient of the multi-layer film is lower than that of the titanium alloy substrate and the wear volume is obviously lower than that of the titanium alloy substrate; the wear volume of the multi-layer film increases with the increase of the temperature; the multi-layer film can significantly reduce the wear resistance of the titanium alloy substrate Wear; multilayer film damage mainly manifested as peeling and abrasive wear form.