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经过化学—机械抛光后 ,用常规的检验旋涡缺陷的方法没有观察到旋涡缺陷的FZSi片 ,用高温热氧化法有时则可以观察到明显的旋涡状分布的条纹图形。使用FTIR、XPS、SEM能谱分析等手段的测量结果表明 ,这种旋涡状分布的图形与晶体中的掺杂剂 (磷、硼 )和杂质氧、碳以及重金属杂质没有明显的依赖关系 ,它是硅中点缺陷在晶体径向截面上呈不均匀条纹状分布的结果。本文对大直径FZSi中的旋涡缺陷的形成机理和消除方法进行了初步的探讨。
After chemical-mechanical polishing, no vortex-defective FZSi sheets were observed by the conventional method of inspecting vortex defects, and obvious vortex-shaped fringe patterns were sometimes observed by the high-temperature thermal oxidation method. The results of FTIR, XPS and SEM analysis show that there is no obvious dependency between this kind of vortex pattern and dopant (phosphorus, boron) and impurity oxygen, carbon and heavy metal impurity in crystal Is the mid-point of silicon defects in the radial cross-section of the crystal was uneven striped distribution results. In this paper, the formation mechanism and elimination method of vortex defects in large diameter FZSi are discussed.