一引言本文讨论了蒸镀形如图1所示的厚度随基底角度而变化的渐变滤光片所用遮蔽扇系统的设计方法。一般用两个扇子与基底共轴,作相对转动而产生的。 Thelen把蒸镀材料在基底上淀积速率dD/(DT)用博立叶级数展开式来计算: dD/(dt)=SQ(φ_1,x)·SQ(φ_2,x) I. INTRODUCTION This paper discusses the design method of the shadowing fan system used in the gradient filter whose vapor deposition thickness varies with the substrate angle as shown in Fig. Commonly used with two fans and the substrate coaxial, resulting from the relative rotation. Thelen calculates the deposition rate dD / (DT) of the deposition material on the substrate using a Boyle series expansion formula: dD / (dt) = SQ (φ_1, x) · SQ (φ_2, x)