为了增加产量和提高质量,我们在电路生产工艺线,基区硼扩散工序由原来液态源硼酸三甲脂改为固态源氮化硼进行硼扩散。经过一个阶段的实践,我们感到效果良好。主要优点是,浓度均匀,重复性好,系统简单,操作方便适于大量投片。现将工艺情况总结如下: In order to increase production and improve quality, we in the circuit production line, the base area of ​​boron diffusion process from the original liquid source of trimethylolpropane into a solid state source of boron nitride for boron diffusion. After a period of practice, we feel effective. The main advantage is that the concentration uniformity, good repeatability, the system is simple, easy to operate for a large number of cast. The process is summarized as follows: