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从理论上对圆光栅的特性进行了分析及精确计算，设计出了光刻伺服磁盘两级定位系统位置传感器的执行机构及检测电路。该传感器既可以应用于实际的磁盘定位系统，也可以做进一步的改进，成为磁盘定位系统的专用性能测试装置。
The characteristics of the circular grating are theoretically analyzed and precisely calculated, and the actuator and detection circuit of the position sensor of the lithography servo disk two-stage positioning system are designed. The sensor can be applied to the actual disk positioning system, you can make further improvements to become a dedicated disk positioning system performance testing device.