一、概述全自动四探针电阻率测试装置是为硅单晶电阻率标准量值传递而研制的,但也可以作为一般硅单晶片的电阻率测试用.该装置已于去年十月通过国家鉴定.以后又经过半年多的应用考察,取得了满意的结果.故作如下介绍,仅供参考. First, an overview Automatic four-probe resistivity test device for the silicon single crystal resistivity standard value transfer and developed, but also as a general silicon single-chip resistivity test. The device was last October through the country After more than six months after the application of inspection, and achieved satisfactory results, so for the following introduction, for reference purposes only.