【摘 要】
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A new detection system in scanning electron microscope, which filters in energy and detects the backscattered electrons close to the microscope axis, is describ
【机 构】
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Department of Physics, Wuhan University, Wuhan 430072rnDépartement de Physique des Matériaux, Univer
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A new detection system in scanning electron microscope, which filters in energy and detects the backscattered electrons close to the microscope axis, is described. This technique ameliorates the dependence of the back. scattering coefficient on atomic number, and suppresses effectively the relief contrast at the same time. Therefore this new method is very suitable to the composition analysis.
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