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用有机螯合前驱体的溶胶—凝胶法在较低温度下合成了LaCrO3薄膜。通过IR、DTA TG、XRD、SEM和TEM手段分析了凝胶形成和转化以及LaCrO3薄膜合成过程和显微结构。结果表明 :螯合前驱体凝胶约在 1 95℃分解 ,在 2 0 0℃、 1h下形成LaCrO3,并且前驱体中络合方式对LaCrO3形成有着重要影响 ;LaCrO3薄膜形成过程包含LaCrO3在基片上成核、生长 ,并通过制膜次数增加来形成具有一定厚度的连续陶瓷薄膜 ;提高热处理温度薄膜的颗粒增大。
LaCrO3 thin films were synthesized by sol-gel method using organic chelating precursors at lower temperature. The formation and transformation of gel and the synthesis and microstructure of LaCrO3 thin films were analyzed by IR, DTA TG, XRD, SEM and TEM. The results show that the chelating precursor gel decomposes at about 95 ℃ and LaCrO3 is formed at 200 ℃ for 1h, and the complexation of the precursors has an important effect on the formation of LaCrO3. The LaCrO3 thin film formation process includes LaCrO3 on the substrate Nucleation, growth, and by increasing the number of films to form a continuous ceramic film with a certain thickness; increase the temperature of the film heat treatment increases.