准分子激光加工的应用前言准分子激光器是一种大能量、高功率紫外激光器，作为超微细加工工具，在各种应用领域均受到重视，并且准分子激光器作为产业使用正逐步实用化。本文介绍准分子激光器的几种实用例子，重点介绍其优良的加工特性。首先，准分子激光加工的特征归纳为... Application of excimer laser processing Introduction The excimer laser is a kind of large-energy, high-power UV laser. As an ultra-fine processing tool, it has been paid attention to in various fields of application, and the excimer laser is gradually being put into practical use as an industry. This article describes several practical examples of excimer lasers, highlighting its excellent processing characteristics. First, the characteristics of excimer laser processing are summarized as